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https://hal-univ-orleans.archives-ouvertes.fr/hal-03431563
Submitted on : Tuesday, November 16, 2021-5:31:32 PM
Last modification on : Thursday, December 2, 2021-5:42:03 PM
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- HAL Id : hal-03431563 , version 1
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Erik von Wahl, Ianis Ellien, Thomas Lecas, Maxime Mikikian. Parametric study of methane dissociation and deposition rates in a Ar/CH4 RF plasma. Journées 2021 du GDR EMILI, Oct 2021, Palaiseau, France. ⟨hal-03431563⟩
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