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Poster communications

Parametric study of methane dissociation and deposition rates in a Ar/CH4 RF plasma

Erik von Wahl 1 Ianis Ellien 1 Thomas Lecas 1 Maxime Mikikian 1 
1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
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Poster communications
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https://hal-univ-orleans.archives-ouvertes.fr/hal-03431563
Contributor : Maxime Mikikian Connect in order to contact the contributor
Submitted on : Tuesday, November 16, 2021 - 5:31:32 PM
Last modification on : Thursday, December 2, 2021 - 5:42:03 PM

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  • HAL Id : hal-03431563, version 1

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CNRS | UNIV-ORLEANS | GREMI | ANR

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Erik von Wahl, Ianis Ellien, Thomas Lecas, Maxime Mikikian. Parametric study of methane dissociation and deposition rates in a Ar/CH4 RF plasma. Journées 2021 du GDR EMILI, Oct 2021, Palaiseau, France. ⟨hal-03431563⟩

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