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Atmospheric Plasma DC Source in the Micro Scale Elaborated by Micro-Nanotechnologies

Abstract : Plasma micro reactors are in their whole elaborated in clean room by MEMS fabrication techniques. They are usually made on silicon platform and constituted by SiO2 dielectric grown by thermal oxidation and nickel coated by PVD process. Electrical and optical characterizations are the main diagnostics used to determine the properties of the discharge and the robustness of the device. SEM images are also made before and after plasma operation. These DC microdischarges can operate continuously during more than 24 hours in stable regime from 100 Torr up to the atmospheric pressure. In these conditions, a high density of reactive species is produced and can be used for gas, liquid or surface treatment.
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Contributeur : Sylvain Iséni Connectez-vous pour contacter le contributeur
Soumis le : lundi 11 octobre 2021 - 18:50:43
Dernière modification le : jeudi 2 décembre 2021 - 17:42:03
Archivage à long terme le : : mercredi 12 janvier 2022 - 20:44:34


Michaud et al. - 2014 - Atmosp... icone licence fichier
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  • HAL Id : hal-03049315, version 1



Ronan Michaud, Sylvain Iséni, Arnaud Stolz, Philippe Lefaucheux, Remi Dussart. Atmospheric Plasma DC Source in the Micro Scale Elaborated by Micro-Nanotechnologies. XXV Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXII), Jul 2022, Paris, France. ⟨hal-03049315⟩



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